American Vacuum Society

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人物別名 Committee on Vacuum Techniques

AVS

A.V.S
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本の一覧

タイトル 著作者等 出版元 刊行年月
Microprocesses and nanotechnology 2003 : 2003 International Microprocesses and Nanotechnology Conference : October 29-31, 2003, Tokyo, Japan : digest of papers sponsored by the Japan Society of Applied Physics ; technical-cosponsored [by] IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.] Business Center for Academic Societies Japan?
c2003
2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel, ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics American Vacuum Society - Northen California Chapter
c2001
Process control and diagnostics : 18-19 September 2000, Santa Clara, USA Michael L. Miller, Kaihan A. Ashtiani, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA) SPIE
c2000
Challenges in process integration and device technology : 18-19 September 2000, Santa Clara, USA David Burnett, Shinʾichiro Kimura, Bhanwar Singh, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SolidState Technology, the Electrochemical Society, [and] AVS--American Vacuum Society (USA) SPIE
c2000
1999 4th International Symposium on Plasma Process-Induced Damage, May 9-11, 1999, Monterey, California, USA editors, Thuy Dao, Mitsumasa Koyanagi, Terence Hook ; technical co-sponsors,IEEE/Electron Devices Society, American Vacuum Society, Japan Society of Applied Physics the American Vacuum Society
c1999
1998 3rd International Symposium on Plasma Process-Induced Damage, June 4-5, 1998, Honolulu, Hawaii, USA editors, Moritaka Nakamura, Thuy Dao, and Terence Hook ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japan Society of Applied Physics Northern California Chapter of the American Vacuum Society
c1998
Multilevel interconnect technology II : 23-24 September, Santa Clara, California Mart Graef, Divyseh N. Patel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [et al.] SPIE
c1998
Chemistry and physics of small-scale structures, February 9-11, 1997, Eldorado Hotel, Santa Fe, New Mexico sponsored and managed by Optical Society of America OSA
c1997
1996 1st International Symposium on Plasma Process-Induced Damage, 13-14 May 1996, Santa Clara, California, USA Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics Northern California Chapter of the American Vacuum Society
c1996
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