Soft x-rays and extreme ultraviolet radiation : principles and applications

David Attwood

This detailed, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The author begins by presenting the relevant basic principles such as radiation and scattering, wave propagation, diffraction, and coherence. He then goes on to examine a broad range of phenomena and applications. The topics covered include spectromicroscopy, EUV astronomy, synchrotron radiation, and soft X-ray lasers. The author also provides a wealth of useful reference material such as electron binding energies, characteristic emission lines and photo-absorption cross-sections. The book will be of great interest to graduate students and researchers in engineering, physics, chemistry, and the life sciences. It will also appeal to practising engineers involved in semiconductor fabrication and materials science.

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[目次]

  • 1. Introduction
  • 2. Radiation and scattering at EUV and soft X-ray wavelengths
  • 3. Wave propagation and refractive index at EUV and soft X-ray wavelengths
  • 4. Multilayer interference coatings
  • 5. Synchrotron radiation
  • 6. Physics of hot-dense plasmas
  • 7. Extreme ultraviolet and soft X-ray lasers
  • 8. Coherence at short wavelengths
  • 9. X-Ray microscopy with diffractive optics
  • 10. Extreme ultraviolet and X-ray lithography
  • Appendices.

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この本の情報

書名 Soft x-rays and extreme ultraviolet radiation : principles and applications
著作者等 Attwood David
Attwood David T.
出版元 Cambridge University Press
刊行年月 2007, c1999
ページ数 xvi, 470 p.
大きさ 26 cm
ISBN 052102997X
9780521029971
NCID BA84782513
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言語 英語
出版国 イギリス
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