Handbook of semiconductor silicon technology

edited by William C. O'Mara, Robert B. Herring, Lee Philip Hunt

This handbook is a comprehensive summary of the science, technology and manufacturing of semiconductor silicon materials. Every known property of silicon is detailed. A complete set of binary phase diagrams is included. Practical aspects such as materials handling, safety, impurity and defect reduction are also discussed in depth. Fundamentals in the areas of silicon precursor compounds, polysilicon, silicon crystal growth, wafer fabrication, epitaxial and CVD deposition are addressed by experts in these fields. Materials properties covered include electrical, optical and mechanical properties, deep level impurities and carrier lifetime, and thermochemistry, as well as specific sections on oxygen, carbon, and nitrogen impurities. The book contains an extensive set of references, tables of materials constants, and silicon properties, and a presentation on the state of the art of materials manufacturing.

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書名 Handbook of semiconductor silicon technology
著作者等 Herring, Robert B.
Hunt, Lee P.
O'Mara, William C.
Hunt Lee P.
シリーズ名 Materials science and process technology series
出版元 Noyes Publications
刊行年月 c1990
ページ数 xx, 795 p.
大きさ 25 cm
ISBN 0815512376
NCID BA11661369
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言語 英語
出版国 アメリカ合衆国