1996 1st International Symposium on Plasma Process-Induced Damage, 13-14 May 1996, Santa Clara, California, USA
Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics
書名
1996 1st International Symposium on Plasma Process-Induced Damage, 13-14 May 1996, Santa Clara, California, USA