Microfabrication using UV laser induced polymerization

Petros Abraha Abbay

[目次]

  • Contents / p3
  • 1 Introduction / p1
  • 2 Fabrication of Micro-molds using Mask-based Pattern Transfer / p8
  • 2.1 Manufacturing Method / p8
  • 2.2 Simulation of the accuracy of pattern transfer / p10
  • 2.3 Experiment on the pattern transfer process / p23
  • 2.4 The manufacturing of high aspect ratio products / p33
  • 2.5 Conclusions / p39
  • 3 The Effect of Physical Parameters on the Fabrication of Microstructures / p40
  • 3.1 Analysis of the shape of the solidified polymer / p40
  • 3.2 The effect of the physical parameters / p46
  • 3.3 Comparison of theoretical and experimental results / p54
  • 3.4 Fabrication of high aspect ratio microstructures / p57
  • 3.5 Conclusions / p61
  • 4 Fabrication of Micro-molds by Direct Shaped Beam Writing / p62
  • 4.1 Manufacturing method / p62
  • 4.2 Analysis of the shape of solidified polymer / p65
  • 4.3 Manufacture of high aspect ratio products / p85
  • 4.4 Conclusions / p90
  • 5 Fabrication of Micro-molds by Direct Focused Beam Writing / p91
  • 5.1 Manufacturing method / p91
  • 5.2 Analysis of the outline of the solidified polymer / p93
  • 5.3 Comparison with experimental data / p104
  • 5.4 Manufacture of high aspect ratio products / p107
  • 5.5 Conclusions / p113
  • 6 Conclusons / p114
  • Reference / p117

「国立国会図書館デジタルコレクション」より

この本の情報

書名 Microfabrication using UV laser induced polymerization
著作者等 Abraha
Petros Abbay
Abraha Petros Abbay
書名別名 紫外線レーザ誘起重合反応によるマイクロ加工
出版元 [s.n.]
刊行年月 [1994]
ページ数 viii, 120 leaves
大きさ 30 cm
NCID BB14523143
※クリックでCiNii Booksを表示
言語 英語
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