Development of scanning probe microscopy for dimensional metrology

[目次]

  • Abstract / p4
  • TABLE OF CONTENTS / p6
  • Chapter I.Introduction / p1
  • 1.1.Industrial requirements for dimensional metrology / p2
  • 1.2.Comparison of various instruments for dimensional metrology / p5
  • 1.3.Summary of thesis / p10
  • References / p14
  • Chapter II.Parallel spring for SPM / p17
  • 2.1.Measuring probe position for metrological SPM / p18
  • 2.2.Guide mechanism / p20
  • 2.3.Monolithic parallel spring / p22
  • 2.4.Design of 10 μm order stroke parallel spring / p23
  • 2.5.A scanner with a scanning range of 250μm / p31
  • 2.6.Discussion / p36
  • 2.7.Summary of this chapter / p37
  • References / p38
  • Chapter III.Nanometer displacement measurement / p39
  • 3.1.High resolution displacement measurement / p40
  • 3.2.Nonlinearity in heterodyne interferometer and balanced detection / p50
  • 3.4.Related techniques / p70
  • 3.5.Summary of this chapter / p70
  • References / p71
  • Chapter IV.Scanning Tunneling Microscopy for dimensional metrology / p72
  • 4.1.Scanning Probe Microscopy / p73
  • 4.2.Electronics for STM / p77
  • 4.3.Parallel spring STM / p80
  • 4.4.STM for linewidth measurement / p99
  • 4.5.STM for three-dimensional metrology and roughness measurement / p107
  • 4.6.Summary of this chapter / p133
  • References / p134
  • Chapter V.Atomic Force Microscopy for dimensional metrology / p137
  • 5.1.Atomic Force Microscopy / p138
  • 5.2.Electron beam deposition tip for AFM / p144
  • 5.3.AFM for micropattern measurement / p150
  • 5.4.PZT thin film displacement sensors for atomic force microscope / p164
  • 5.5.Summary of this chapter / p175
  • References / p176
  • Chapter VI.Accuracy of measured pitch and step height / p178
  • 6.1.Environmental disturbances / p179
  • 6.2.Estimation of the errors in pitch and step height measurement / p183
  • 6.3.Comparison with another instruments / p190
  • 6.4.Summary of this chapter / p191
  • Chapter VII.Advanced SPM for dimensional metrology / p192
  • 7.1.Scanning tunneling microscope equipped with a crystalline lattice reference and interferometer for step height measurement / p193
  • 7.2.A force microscope with a fluorescence optical microscope / p204
  • 7.3.Summary of this chapter / p217
  • References / p218
  • Chapter VIII.Summary / p220
  • Appendix.Publications by the author / p1
  • I.Reviewed paper on SPM metrology / p1
  • II.International conference proceedings on SPM metrology / p1
  • III.Domestic conference proceedings on SPM metrology / p2
  • IV.Symposium and short courses on SPM metrology / p3
  • V.Bulletin on SPM metrology / p3
  • VI.Other reviewed papers / p4
  • VII.Other international conference proceedings / p4
  • VIII.Other domestic conference proceedings / p5

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この本の情報

書名 Development of scanning probe microscopy for dimensional metrology
著作者等 藤井 透
書名別名 形状計測用走査プローブ顕微鏡の開発
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